M3350/3360/3370/3390 Multi-Channel Field Voltage Detection

Features: 

• Digital, microprocessor-based controllers, multi-channel,
  digital I/O, auxiliary I/O, local addressability, RS-485, and
  Modbus data output.
• Multiple antenna configurations including passive, active, and high speed electrometer.
• Precision resolution.
• Programmable alarm set-points with tool shutdown option.
• Voltage/polarity displays, local red/green LEDs each channel.
• Provides easy integration, cost/performance advantages over other monitoring solutions, direct communication to other Novx instruments, a tool controller, or PEMS.
• Detect field voltage in a wide variety of applications:
  • Monitor field voltage at distances, monitor ionizer balance and perform In Situ decay testing without the added expense of a CPM.
• Measure and record field voltage down to 0.1V.
• Enable closed-loop feedback control to select ionizers based on balance or decay test results for up to 3 SSDC ionizer fans or a 3 fan blower.
• Reduce process variations, decrease scrap/rework, and improve process yields.
• Visual indicators at the instrument