HOME \ OUR SERVICES \ ESD SURVEYS, AUDITS AND TESTING \
| Tests & Services |
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These services are categorised as follows: |
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ESD Audit: Checking and verification of every aspect of in-house ESDC programmes and ESD safe practices |
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Tools & Minienvironments: Testing and verification of materials, work surfaces, grounding, ionizers, the
general environment and include surface charge/field potential, surface resistivity, EMI, tribocharging
propensity measurements |
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General Testing: Includes the following tests and measurements for specific materials, work surfaces, garments, ESD-safe carriers / pods and equipment where appropriate: |
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Resistance / Resistivity (surface / volume) |
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Grounding (including personnel) verification |
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Static charge / electric field potential check |
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Tribocharging propensity |
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Identification of possible ESD events by locating EMI events
(using a ESD event monitor detector) |
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Long term verification tests (for evaluation) |
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Individual Services : |
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ESD/ESC Audit |
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Checking and verification of every aspect of in-house and factory-wide ESDC programs and ESD safe practices.
The audit includes surface charge/field potential/triboelectrification and resistance measurements (among
others) on tools, direct/indirect materials, workstations, Electrostatic Protected Areas (EPAs), floors, ESD
garments, mobile equipment, shelving, footwear, etc.. |
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Developing and Managing an ESD Control Program |
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Includes developing an ESD Control program based on ESD susceptibility of parts or products at different stages
of the manufacturing process. The scope entails doing a pre-audit where baseline measurements are made,
then formulating the actual ESD control program, implementing the program itself, and establishing compliance
verification frequency, methodology and training. |
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ESD Training |
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Training is available in ESD Basics, Static Charge Control, Developing & Managing an ESD Control Programme,
Theory/Fundamentals/Applications of Ionization, plus In-field ESD Testing & Auditing for operators, technicians
and engineers. The training could last a half-day or stretch to a full-day seminar with hands-on demonstrations
and a factory walk-through. |
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ESD Materials/Parts Testing |
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Testing of materials or parts like flooring, reticle pods, wafer carriers, ionizers, mats, garments, etc., for
independent qualification purposes is available at our ISO Class 6 ESD safe facility or on-site. Testing is done
according to recognised ESDA standards and relevant data and a summary will be submitted after the testing. |
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ESD Testing for Tools/Minienvironments |
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Includes testing and verification of materials, work surfaces, transfer mechanisms, grounding, ionization and the
general environment and enclosures. Tests encompass surface charge/field potential and triboelectrification
examinations, resistance measurements, grounding checks, quantifying number and magnitude of ESD
events,electromagnetic field measurement and ionizer performance measurement, etc. |
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Implementing a ESD Compliance Verification Plan |
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Includes developing a compliance verification plan to check and assess the ESD environment with regard to
periodic tests and measurements. The plan will cover personnel, materials, production tools, storage and
transfer mechanisms and components of a cleanroom environment, where applicable. The type of tests to be
carried out, the test equipment to be used, the acceptance criteria and the frequency of testing are all covered as
part of the compliance verification plan.
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Ionization |
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Includes evaluation and recommendation of ionizers for different applications. Long-term evaluation can also be
undertaken with mon ito ring of defined parameters. The evaluation includes graphical plots of the offset voltages
and rates of decay over time. Other parameters like particle counts can also be mon ito red under a controlled
cleanroom environment. The evaluation can also include the performance of the ionizers with feedback
sensors/controllers and with different types/materials of emitter points. |
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Monitoring & Quantifying ESD Events |
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Includes using ESD event mon ito rs and software to evaluate the environment of concern. By appropriate
placement of the ESD event mon ito rs, ESD events can be quickly picked up and assessed depending on the
ESD susceptibility of the product and/or environment. Remedial action can then be recommended and
implemented. Can be implemented as part of a facility's ESD compliance verification plan as quantifiable data
can be obtained on the performance and success of the adopted ESD control program through such
measurements. |
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Semi E78 Compliance Testing |
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In conjunction with our value-added partners, the above compliance testing can be undertaken to assess the
electrostatic discharge (ESD) and electrostatic attraction (ESA) environment within the semiconductor tools.
A series of tests are undertaken to ascertain and determine the sensitivity level of the tool, based on the static
charge levels measured (Level 1 to Level 4, measured in both C and volts/cm). |
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